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Coating Equipment

FCVA Hybrid Batch System / BFSI 1210

The BFSI 1210 system combines the state-of-the-art Filtered Cathodic Vacuum Arc (FCVA) thin film coating technology with our in-house anode layer ion beam, source body magnetron sputtering system and hand-picked pulsed bias. It also includes double-bend magnetic filtration system. The system obtains 100% pure charged ions through plasma screening and it ensures the consistent uniformity and density of the coated film, result in improved wear resistance of the film layer. In addition, the system is fully automated with user-friendly monitoring system and simple operation procedures for production efficiency and consistent quality.

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Features

  • FCVA

    Excellent coating performance

  • Carbon or Metal
    Source

    Extend coating types

  • Ion Beam
    or Sputtering

    Flexible configuration

  • High Vacuum
    Pump

    Minimise vacuum pump waiting time

  • Rotating Substrate
    Holder

    Allows angle tilt

  • User Friendly
    Control Panel

    Easy to operate and control

Specification

Description
Process Chamber with Multi-Source Dimension 1.2 (Ø ) x 1.0 (H) m
Material SUS 304
FCVA Source Multiple FCVA metal and Carbon Sources
Other Sources Optional Magnetron Sputter Source and Ion Beam Cleaning Source
Vacuum Control 2pcs x TC Gauge,  1pc x Ion Gauge
High Vacuum Pump 2pcs x 3,000 L/s + 1pc x 2,400 L/s Turbo Molecular Pump
Pressure Control Capacitance Manometer, Multiple MFCs
Mechanical Pump (Roughing) Rotary Pump + Roots Pump
Ultimate Vacuum < 1.0 x 10-4 Pa
Substrate Holder Dimension 1.020 (Ø ) x 0.5 (H) m
Material SUS 304
Function Holder Rotation Speed 0 - 3 rpm, Bias-able
System Dimension ≈ 5.3 (L) x 4.9 (W) x 2.7 (H) m

Applications

  • Tool and Die
  • Measurement and Analytics
  • Optics
  • Textile
  • Semiconductor
  • Automotive
  • Printing and Imaging
  • Sanitary Fitting
  • Life Science

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Frequently Asked Questions

  • What are the main advantages of Nanofilm coating equipment? 

  • What are the vaporization methods of your coating equipment? 

  • What substates can your coating equipment coat? 

  • What is the substrate maximum size?  

  • What type of coating can your equipment coat? 

  • What is your lead time?  

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